Stacks of hydrogen-lean aluminum oxide, deposited via plasma-assisted atomic-layer-deposition, and hydrogen-rich plasma-enhanced chemical vapor-deposited silicon nitride (SiNx) are applied to boron-doped float-zone silicon ...

This thesis examines carrier lifetime instabilities in oxygen-rich boron-doped p-type Czochralski-grown silicon (Cz-Si) with the focus on the permanent deactivation of the boron-oxygen (BO)-related defect center leading ...